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AREN 8626  MEMS SENSORS DYNAMICS (3 credits)

Study of the dynamics of Microelectromechanical system (MEMS) beam-structures. Modeling principles and data analysis from different types of MEMS will be explained along with deep theoretical and experimental investigation of nonlinear MEMS dynamics. Learn to conduct experiments using state-of-the-art MEMS characterization tools. (Cross-listed with AREN 4620).

Prerequisite(s)/Corequisite(s): Instructor Permission