ECEN 820 PLASMA PROCESSING OF SEMICONDUCTORS (3 credits)
Physics of plasmas and gas discharges developed. Includes basic collisional theory, the Boltzman equation and the concept of electron energy distribution. Results are related to specific gas discharge systems used in semiconductor processing, such as sputtering, etching, and deposition systems. (Cross-listed with ECEN 420)
Prerequisite(s): Senior or graduate Standing. Not open to non-degree graduate students.