AREN 4620 MEMS SENSORS DYNAMICS (3 credits)
Study of the dynamics of Microelectromechanical system (MEMS) beam-structures. Modeling principles and data analysis from different types of MEMS will be explained along with deep theoretical and experimental investigation of nonlinear MEMS dynamics. Learn to conduct experiments using state-of-the-art MEMS characterization tools. (Cross-listed with AREN 8626).
Prerequisite(s): Instructor Permission